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Solid phase epitaxial growth of Si on SiSb surface phases for the formation of δ-doped layers and δiδi-superlattices
A.V. Zotov, A.A. Saranin, V.G. Lifshits, E.A. KhramtsovaVolume:
230
Year:
1990
Language:
english
DOI:
10.1016/0039-6028(90)90004-r
File:
PDF, 1.26 MB
english, 1990