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Radiation damage in silicon (001) due to low energy (60–510 eV) argon ion bombardment
Amir H. Al-Bayati, Kevin G. Orrman-Rossiter, Ranjan Badheka, D.G. ArmourVolume:
237
Year:
1990
Language:
english
DOI:
10.1016/0039-6028(90)90533-e
File:
PDF, 1.65 MB
english, 1990