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Composition and structure of the native Si oxide by high depth resolution medium energy ion scatering
Amir H. Al-Bayati, Kevin G. Orrman-Rossiter, J.A. van den Berg, D.G. ArmourVolume:
241
Year:
1991
Language:
english
DOI:
10.1016/0039-6028(91)90214-d
File:
PDF, 1.06 MB
english, 1991