Chlorine/silicon surface reactions under heating

Surface Science 1991 Vol. 250; Iss. 1-3

Chlorine/silicon surface reactions under heating

Nahomi Aoto, Eiji Ikawa, Takamaro Kikkawa, Yukinori Kurogi
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Volume:
250
Year:
1991
Language:
english
DOI:
10.1016/0039-6028(91)90726-9
File:
PDF, 756 KB
english, 1991
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