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Surface roughness evolution in the growth of a-Si: H thin films studied by ellipsometry
A. Canillas, J. Campmany, J.L. Andújar, E. Bertran, J.L. MorenzaVolume:
251-252
Year:
1991
Language:
english
DOI:
10.1016/0039-6028(91)90979-3
File:
PDF, 414 KB
english, 1991