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SiO production from Si(100) and (111) surfaces by reaction with O2 beams
Katsuyuki Ohkubo, Yoshiyuki Igari, Shinji Tomoda, Isao KusunokiVolume:
260
Year:
1992
Language:
english
DOI:
10.1016/0039-6028(92)90017-z
File:
PDF, 872 KB
english, 1992