Si(001) growth dynamics during Si GSMBE from disilane
S.M. Mokier, W.K. Liu, N. Ohtani, J. Zhang, B.A. JoyceVolume:
275
Year:
1992
Language:
english
DOI:
10.1016/0039-6028(92)90644-l
File:
PDF, 1.00 MB
english, 1992