The reaction of atomic oxygen with Si(100) and Si(111): II. Adsorption, passive oxidation and the effect of coincident ion bombardment
J.R. Engstrom, D.J. Bonser, Thomas EngelVolume:
268
Year:
1992
Language:
english
DOI:
10.1016/0039-6028(92)90966-a
File:
PDF, 3.48 MB
english, 1992