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Defect initiated particle emission from semiconductor surfaces by laser irradiation
Yasuo Nakai, Ken Hattori, Akiko Okano, Tetsuya Taguchi, Jun'ichi Kanasaki, Noriaki ItohVolume:
283
Year:
1993
Language:
english
DOI:
10.1016/0039-6028(93)90975-p
File:
PDF, 762 KB
english, 1993