Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
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Status of IC applications of ion implantation
T.C. SmithVolume:
21
Year:
1987
Language:
english
DOI:
10.1016/0168-583x(87)90804-4
File:
PDF, 491 KB
english, 1987