Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1991 Vol. 59-60; Iss. part-P2
Formation of phosphosilicate glass layers in glasses by ion implantation
Oyoshi Keiji, Tagami Takashi, Yamashita Ken, Tanaka ShuheiVolume:
59-60
Year:
1991
Language:
english
DOI:
10.1016/0168-583x(91)95822-u
File:
PDF, 393 KB
english, 1991