Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1993 Vol. 80-81; Iss. part-P1
![](/img/cover-not-exists.png)
Investigation of buried AlN layers formed by nitrogen implantation into Al
C. Lin, J.A. Kilner, R.J. Chater, J. Li, A. Nejim, J.P. Zhang, P.L.F. HemmentVolume:
80-81
Year:
1993
Language:
english
DOI:
10.1016/0168-583x(93)96133-w
File:
PDF, 301 KB
english, 1993