Adaptation of the 70 kV INP ion implanter to the IBAD...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1994 Vol. 89; Iss. 1-4

Adaptation of the 70 kV INP ion implanter to the IBAD technique

B. Rajchel, M. Drwiega, E. Lipińska, M. Wierba
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Volume:
89
Year:
1994
Language:
english
DOI:
10.1016/0168-583x(94)95196-9
File:
PDF, 315 KB
english, 1994
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