Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1996 Vol. 111; Iss. 3-4
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SIMS study on redistribution of implanted impurities in InSb and InAs during post-implantation annealing
N.N. Gerasimenko, G.S. Khryashchev, G.L. Kuryshev, A.M. Myasnikov, V.I. ObodnikovVolume:
111
Year:
1996
Language:
english
DOI:
10.1016/0168-583x(95)01457-8
File:
PDF, 367 KB
english, 1996