The effect of substrate bias voltages on impact resistance...

Applied Surface Science 2009 Vol. 255; Iss. 7

The effect of substrate bias voltages on impact resistance of CrAlN coatings deposited by modified ion beam enhanced magnetron sputtering

Yu Chunyan, Tian Linhai, Wei Yinghui, Wang Shebin, Li Tianbao, Xu Bingshe
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Volume:
255
Year:
2009
Language:
english
DOI:
10.1016/j.apsusc.2008.10.089
File:
PDF, 839 KB
english, 2009
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