Mechanical stresses in silicon carbonitride films obtained by PECVD from hexamethyldisilazane
Shayapov, V.R., Rumyantsev, Yu.M., Dzyuba, A.A., Ayupov, B.M., Fainer, N.I.Volume:
265
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2012.11.017
Date:
January, 2013
File:
PDF, 212 KB
english, 2013