Growth of very large grains in polycrystalline silicon thin films by the sequential combination of vapor induced crystallization using AlCl3 and pulsed rapid thermal annealing
Kyung Min Ahn, Seung Mo Kang, Byung Tae AhnVolume:
12
Year:
2012
Language:
english
DOI:
10.1016/j.cap.2012.04.010
File:
PDF, 807 KB
english, 2012