Influence of the substrate bias voltage on the physical...

Influence of the substrate bias voltage on the physical properties of dc reactive sputtered Ta2O5 films

K. Cang, L.Y. Liang, Z.M. Liu, L. Wu, H. Luo, H.T. Cao, Y.S. Zou
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
550
Year:
2013
Language:
english
DOI:
10.1016/j.jallcom.2012.09.134
File:
PDF, 915 KB
english, 2013
Conversion to is in progress
Conversion to is failed