Epitaxial growth and characterization of silicon carbide films
Govindhan Dhanaraj, Michael Dudley, Yi Chen, Balaji Ragothamachar, Bei Wu, Hui ZhangVolume:
287
Year:
2006
Language:
english
DOI:
10.1016/j.jcrysgro.2005.11.021
File:
PDF, 340 KB
english, 2006