Proton beam writing and electroplating for the fabrication...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2009 Vol. 267; Iss. 14

Proton beam writing and electroplating for the fabrication of high aspect ratio Au microstructures

Weisheng Yue, Yaping Ren, Jeroen Anton van Kan, Sher-Yi Chiam, Linke Jian, Herbert O. Moser, Thomas Osipowicz, Frank Watt
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Volume:
267
Year:
2009
Language:
english
DOI:
10.1016/j.nimb.2009.03.103
File:
PDF, 471 KB
english, 2009
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