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Development of a low frequency electrostatic comb-drive energy harvester compatible to SoC design by CMOS process
Geeng-Jen Sheu, Shih-Ming Yang, Tehsi LeeVolume:
167
Year:
2011
Language:
english
DOI:
10.1016/j.sna.2010.07.013
File:
PDF, 1.13 MB
english, 2011