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Deposition of nano-diamond-like carbon films by an atmospheric pressure plasma gun and diagnostic by optical emission spectrum on the process
Xinchao Bian, Qiang Chen, Yuefei Zhang, Lijun Sang, Wenjie TangVolume:
202
Year:
2008
Language:
english
DOI:
10.1016/j.surfcoat.2008.06.143
File:
PDF, 617 KB
english, 2008