Structural and optical properties of nc-3C–SiC films...

Structural and optical properties of nc-3C–SiC films synthesized by hot wire chemical vapor deposition from SiH4–C2H2–H2 mixture

Honglie Shen, Tianru Wu, Yuanyuan Pan, Lei Zhang, Bin Cheng, Zhihao Yue
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Volume:
522
Year:
2012
Language:
english
DOI:
10.1016/j.tsf.2012.02.011
File:
PDF, 581 KB
english, 2012
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