Plasma-enhanced atomic layer deposition of Cu–Mn films with...

Thin Solid Films 2012 Vol. 521; Iss. none

Plasma-enhanced atomic layer deposition of Cu–Mn films with formation of a MnSixOy barrier layer

Dae-Yong Moon, Dong-Suk Han, Jae-Hyung Park, Sae-Young Shin, Jong-Wan Park, Baek Mann Kim, Jun Yeol Cho
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Volume:
521
Year:
2012
Language:
english
DOI:
10.1016/j.tsf.2012.02.015
File:
PDF, 540 KB
english, 2012
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