Thickness dependent residual stress in sputtered AlN thin films
Paulius Pobedinskas, Jean-Christophe Bolsée, Wim Dexters, Bart Ruttens, Vincent Mortet, Jan D'Haen, Jean V. Manca, Ken HaenenVolume:
522
Year:
2012
Language:
english
DOI:
10.1016/j.tsf.2012.08.015
File:
PDF, 872 KB
english, 2012