Fabrication of Al doped ZnO films using atmospheric pressure cold plasma
Yoshifumi Suzaki, Hayato Miyagawa, Kenzo Yamaguchi, Yoon-Kee KimVolume:
522
Year:
2012
Language:
english
DOI:
10.1016/j.tsf.2012.09.016
File:
PDF, 2.09 MB
english, 2012