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Reflection-based near-field ellipsometry for thin film characterization
Liu, Zhuang, Zhang, Ying, Kok, Shaw Wei, Ng, Boon Ping, Soh, Yeng ChaiVolume:
124
Language:
english
Journal:
Ultramicroscopy
DOI:
10.1016/j.ultramic.2012.08.003
Date:
January, 2013
File:
PDF, 963 KB
english, 2013