Hamaker Constants in Integrated Circuit Metalization

Hamaker Constants in Integrated Circuit Metalization

Sean Eichenlaub, Carly Chan, Stephen P. Beaudoin
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Volume:
248
Year:
2002
Language:
english
Pages:
9
DOI:
10.1006/jcis.2002.8241
File:
PDF, 168 KB
english, 2002
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