Microfluidic MEMS for semiconductor processing

IEEE Transactions on Components Packaging and Manufacturing Technology Part B 1998 Vol. 21; Iss. 4

Microfluidic MEMS for semiconductor processing

Henning, A.K., Firch, J.S., Harris, J.M., Dehan, E.B., Cozad, B.A., Christel, L., Fathi, Y., Hopkins, D.A., Jr, Lilly, L.J., McCulley, W., Weber, W.A., Zdeblick, M.
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Volume:
21
Year:
1998
Language:
english
DOI:
10.1109/96.730413
File:
PDF, 548 KB
english, 1998
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