Design Of Ion-implanted MOSFET's with Very Small Physical...

Design Of Ion-implanted MOSFET's with Very Small Physical Dimensions

Dennard, R.H., Gaensslen, F.H., Hwa-Nien Yu, Rideout, V.L., Bassous, E., Leblanc, A.R.
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Volume:
87
Year:
1999
Language:
english
DOI:
10.1109/jproc.1999.752522
File:
PDF, 331 KB
english, 1999
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