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Novel Nano-Scale Conductive Films With Enhanced Electrical Performance and Reliability for High Performance Fine Pitch Interconnect
Yi Li, Myung Jin Yim, Kyoung Sik Moon, Wong, C.P.Volume:
32
Year:
2009
Language:
english
DOI:
10.1109/tadvp.2008.2003428
File:
PDF, 2.42 MB
english, 2009