Simulation of Critical IC-Fabrication Steps
Pichler, P., Jungling, W., Selberherr, S., Guerrero, E., Potzl, H.P.Volume:
4
Year:
1985
Language:
english
DOI:
10.1109/tcad.1985.1270136
File:
PDF, 2.24 MB
english, 1985