Formation of PZT thin-film capacitors over W-plugs and...

Electronics and Communications in Japan (Part II: Electronics)) 2000 Vol. 83; Iss. 8

Formation of PZT thin-film capacitors over W-plugs and low-voltage operation for high-density LSIs

Katsuhiro Aoki, Tomoyuki Sakoda, Satoshi Hashimoto, Yukio Fukuda, Osamu Handa, Tomomasa Emoto
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Volume:
83
Year:
2000
Language:
english
Pages:
7
DOI:
10.1002/1520-6432(200008)83:83.0.co;2-#
File:
PDF, 469 KB
english, 2000
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