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Bulk electrochemical etching of semiconductor single-crystal silicon in HF-containing solutions
I. L. Baranov, L. V. Tabulina, T. G. Rusal’skayaVolume:
85
Language:
english
DOI:
10.1134/s1070427212100102
Date:
October, 2012
File:
PDF, 209 KB
english, 2012