Development of a 3D capacitive gyroscope with reduced parasitic capacitance
Walther, A, Desloges, B, Lejuste, C, Coster, B, Audebert, P, Willemin, JVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/2/025013
Date:
February, 2013
File:
PDF, 1.19 MB
english, 2013