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Passive Substrate Temperature Compensation of Doubly Anchored Double-Ended Tuning Forks
Myers, David R., Azevedo, Robert G., Chen, Li, Mehregany, Mehran, Pisano, Albert P.Volume:
21
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2012.2205903
Date:
December, 2012
File:
PDF, 872 KB
english, 2012