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Fabrication of a sub-10 nm silicon nanowire based ethanol sensor using block copolymer lithography
Rasappa, Sozaraj, Borah, Dipu, Faulkner, Colm C, Lutz, Tarek, Shaw, Matthew T, Holmes, Justin D, Morris, Michael AVolume:
24
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/24/6/065503
Date:
February, 2013
File:
PDF, 1.18 MB
english, 2013