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Low-pressure chemical vapor deposition of tungsten carbide (WC) thin films
Xue, Ziling, Caulton, Kenneth G., Chisholm, Malcolm H.Volume:
3
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm00015a004
Date:
May, 1991
File:
PDF, 381 KB
english, 1991