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Passive and Active Oxidation of Si(100) by Atomic Oxygen: A Theoretical Study of Possible Reaction Mechanisms
Choi, Cheol Ho, Liu, Da-Jiang, Evans, J. W., Gordon, Mark S.Volume:
124
Language:
english
Journal:
Journal of the American Chemical Society
DOI:
10.1021/ja012454h
Date:
July, 2002
File:
PDF, 719 KB
english, 2002