Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2013 / 12 Vol. 317
Systematic investigations of low energy Ar ion beam sputtering of Si and Ag
Feder, R., Frost, F., Neumann, H., Bundesmann, C., Rauschenbach, B.Volume:
317
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2013.01.056
Date:
December, 2013
File:
PDF, 1.22 MB
english, 2013