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Effects of buried oxide layer on indium diffusion in separation by implantation of oxygen
Chen, Peng, Zhu, Ming, Fu, Ricky K. Y., Chu, Paul K., An, Zhenghua, Liu, Weili, Montgomery, Neil, Biswas, SukantaVolume:
96
Year:
2004
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1784615
File:
PDF, 399 KB
english, 2004