Al and B ion‐implantations in 6H‐ and 3C‐SiC

Journal of Applied Physics 1995 Vol. 77; Iss. 6

Al and B ion‐implantations in 6H‐ and 3C‐SiC

Rao, Mulpuri V., Griffiths, Peter, Holland, O. W., Kelner, G., Freitas, J. A., Simons, David S., Chi, P. H., Ghezzo, M.
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Volume:
77
Year:
1995
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.358776
File:
PDF, 1.12 MB
english, 1995
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