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Electrical, optical and structural investigation of plasma-enhanced chemical-vapor-deposited amorphous silicon oxynitride films for solar cell applications
Brinkmann, Nils, Sommer, Daniel, Micard, Gabriel, Hahn, Giso, Terheiden, BarbaraVolume:
108
Language:
english
Journal:
Solar Energy Materials and Solar Cells
DOI:
10.1016/j.solmat.2012.09.025
Date:
January, 2013
File:
PDF, 611 KB
english, 2013