Effects of radio-frequency powers on the properties of carbon coatings on optical fibers prepared by thermal chemical vapor deposition enhanced with inductively coupled plasma
Lai, Liang-Hsun, Shiue, Sham-Tsong, Lin, Hung-YiVolume:
87
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2012.02.015
Date:
January, 2013
File:
PDF, 321 KB
english, 2013