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Nanobeam Diffraction: Technique Evaluation and Strain Measurement on Complementary Metal Oxide Semiconductor Devices
Favia, P., Bargallo Gonzales, M., Simoen, E., Verheyen, P., Klenov, D., Bender, H.Volume:
158
Year:
2011
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3546851
File:
PDF, 3.86 MB
english, 2011