Electrochemical X-ray Photolithography
Eliseev, Andrei A., Sapoletova, Nina A., Snigireva, Irina, Snigirev, Anatoly, Napolskii, Kirill S.Volume:
51
Language:
english
Journal:
Angewandte Chemie International Edition
DOI:
10.1002/anie.201204801
Date:
November, 2012
File:
PDF, 825 KB
english, 2012