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Dynamics and Electronegativity of Oxygen RF Plasmas
Küllig, C., Dittmann, K., Wegner, T., Sheykin, I., Matyash, K., Loffhagen, D., Schneider, R., Meichsner, J.Volume:
52
Language:
english
Journal:
Contributions to Plasma Physics
DOI:
10.1002/ctpp.201200048
Date:
November, 2012
File:
PDF, 590 KB
english, 2012