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Growth and characterization of thin Si-C films in RF plasma and optical emission spectroscopy
Kurcz, Magdalena, Huczko, AndrzejVolume:
249
Language:
english
Journal:
physica status solidi (b)
DOI:
10.1002/pssb.201200078
Date:
December, 2012
File:
PDF, 344 KB
english, 2012