Electrical characteristics of ALD-deposited Al 2 O 3 thin films on p-type germanium substrates
Botzakaki, M., Kerasidou, A., Xanthopoulos, N., Skarlatos, D., Kennou, S., Ladas, S., Georga, S. N., Krontiras, C. A.Volume:
10
Language:
english
Journal:
physica status solidi (c)
DOI:
10.1002/pssc.201200400
Date:
January, 2013
File:
PDF, 251 KB
english, 2013