X-ray imaging and diffraction study of strain relaxation in...

physica status solidi (c) 2013 / 01 Vol. 10; Iss. 1

X-ray imaging and diffraction study of strain relaxation in MBE grown SiGe/Si layers

Burle, N., Escoubas, S., Kasper, E., Werner, J., Oehme, M., Lyutovich, K.
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Volume:
10
Language:
english
Journal:
physica status solidi (c)
DOI:
10.1002/pssc.201200544
Date:
January, 2013
File:
PDF, 688 KB
english, 2013
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